SUCKING METHOD FOR CRYSTAL SUBSTRATE, SUCKING NOZZLE AND INVESTIGATION DEVICE FOR CRYSTAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To decrease errors in sucking, holding and releasing a crystal substrate by an absorbing nozzle. SOLUTION: A groove 17 that passes through an opening 16 is formed on a nozzle absorbing face 12. When sucking, air with a volume that will not damage absorbability of the crystal substrate is let inside the sucking nozzle 10 from the groove 17 formed on the nozzle absorbing face 12 to prevent stopping of an air flow even at sucking. When releasing, air with a volume that will not damage releasability of the crystal substrate is let outside the absorbing nozzle 10 from the groove 17 formed on the nozzle absorbing face 12 to have an air flow discharged from except for the opening 16 at releasing.