| 摘要 |
A filmed head slider, which is capable of writing data with high density, can be made by uniformly machining film layers formed on a wafer for making the filmed head sliders. The method of machining the wafer comprises the steps of: measuring curvature of the filmed surface of the wafer; selecting a machining plate having a machining face, whose curvature is in accord with that of the filmed surface of the wafer, on the basis of the result of the measuring step; and machining the filmed surface of the wafer with the selected ma chining plate.
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