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发明名称
摘要
申请公布号
JP3181121(B2)
申请公布日期
2001.07.03
申请号
JP19920340751
申请日期
1992.12.21
申请人
发明人
分类号
C23C16/50;C23C16/511;C23C16/54;H01L21/205;(IPC1-7):C23C16/511
主分类号
C23C16/50
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