| 摘要 |
PROBLEM TO BE SOLVED: To obtain an edge bead remover having excellent resist dissolving rate, low toxicity and extremely high safety, excellent in environmental protection, having extremely slight unpleasant smell, relatively high boiling point and good operability, not generating residue and deposit and capable of producing a high-grade substrate for production of electronic parts. SOLUTION: This edge bead remover comprises an ortho acid ester. |
