| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a delivery device for a substrate capable of automatically delivering the substrate to a delivered part, by preventing a bad influence from being given to a thin film formed in one surface of the substrate. SOLUTION: This device is equipped with a receiving recessed part 3 provided in a roller conveyer 1 conveying a substrate B of a solar battery by supporting a lower surface b2 in an opposite side of an upper surface b1 formed with a transparent electrode layer A of the substrate and a delivery machine 11 reciprocating the substrate B moved over this recessed part 3 and a prescribed delivered part. The receiving recessed part 3 is formed to be opened to the end of conveyance of the roller conveyer 1. The delivery machine 11 has a suction head 12 reciprocated to move over the receiving recessed part 3 and the delivered part. One or more vacuum suction pads 22 are mounted in this head 12. This suction head 12, which can be moved in and out of the receiving recessed part 3, is characterized by sucking the lower surface b2 of the substrate B conveyed to the receiving recessed part 3 to scoop the substrate B carried toward the delivered part.</p> |
