发明名称 |
DEVICE FOR TAKING SEMICONDUCTOR WAFER OUT OF RUNNER DISK OF DOUBLE SURFACE POLISHING MACHINE |
摘要 |
<p>PROBLEM TO BE SOLVED: To improve the working accuracy while stabilizing the transference in the case of cutting and grinding an end surface by transferring a device main body along an end surface of a work such as a steel pipe and a plate material, or transferring the work. SOLUTION: This device is formed of a transferring drum to be rotated by a rotary driving motor, at least two pushing bodies energized by springs in the transferring drum direction, and a tool for working an end surface of a work. A rolling belt is stretched between both the pushing bodies.</p> |
申请公布号 |
JP2001179569(A) |
申请公布日期 |
2001.07.03 |
申请号 |
JP20000303473 |
申请日期 |
2000.10.03 |
申请人 |
PETER WOLTERS WERKZEUGMAS GMBH |
发明人 |
POTEMPKA EBERHARD |
分类号 |
B23Q7/04;B23Q7/00;B24B7/17;B24B37/34;B65G49/07;H01L21/304;H01L21/677;(IPC1-7):B23Q7/04 |
主分类号 |
B23Q7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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