发明名称 COATING NOZZLE FOR LIQUID AND COATING DEVICE AND COATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a coating nozzle for liquid capable of forming a uniform coating film with a small quantity of a coating liquid on a circular surface, preventing the physical staining in the forming process and processing for a shorter time. SOLUTION: In the coating nozzle 30 for liquid having a thin plate like space part 42 for housing the liquid inside and a discharge port 36 structured by opening the end part of the space part 42 outside, a feed port 46 for feeding the liquid to the space part 42 and a 1st suction port 50 arranged almost at both end parts of the space part 42 and formed by drawing both end parts of the tip directing a discharge port 36 for the liquid into the space part 42 are provided.
申请公布号 JP2001179157(A) 申请公布日期 2001.07.03
申请号 JP19990368275 申请日期 1999.12.24
申请人 HIRATA CORP 发明人 HARUKAWA SUMIO
分类号 B05D1/40;B05C5/02;B05C11/08;H01L21/027;(IPC1-7):B05C5/02 主分类号 B05D1/40
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