| 发明名称 |
CORROSION-RESISTANT CERAMIC MEMBER AND METHOD FOR PRODUCING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic member excellent in plasma resistance. SOLUTION: This corrosion-resistant ceramic member consists essentially of yttria and is composed by regulating the relative density to >=95%.
|
| 申请公布号 |
JP2001181042(A) |
申请公布日期 |
2001.07.03 |
| 申请号 |
JP19990371690 |
申请日期 |
1999.12.27 |
| 申请人 |
KYOCERA CORP |
发明人 |
HAMADA TOSHIYUKI |
| 分类号 |
C04B35/50;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C04B35/50 |
主分类号 |
C04B35/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
