发明名称 |
Dry compressing vacuum pump having a gas ballast device |
摘要 |
A dry compressing vacuum pump (1) has a continuous or graduated inner compression. A gas ballast device (8) selectively adds a ballast gas to a pumped gas. The gas ballast device has an isolating valve (11), a non-return valve (12) which prevents the escape of gases from the pump through the gas ballast device to the outside, and a pressure differential valve (13). |
申请公布号 |
AU6443100(A) |
申请公布日期 |
2001.07.03 |
申请号 |
AU20000064431 |
申请日期 |
2000.08.23 |
申请人 |
LEYBOLD VAKUUM GMBH |
发明人 |
LUTZ ARNDT;THOMAS DREIFERT;MICHAEL HOLZEMER;JURGEN MEYER;FRANK SCHONBORN |
分类号 |
F04C18/16;F04B25/00;F04B37/14;F04B37/20;F04C25/02;F04C28/28 |
主分类号 |
F04C18/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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