| 摘要 |
PROBLEM TO BE SOLVED: To provide a microelectronic machine actuator device capable of double operation. SOLUTION: This device comprises a first substrate 12, a first operation electrode 20 formed on the first substrate 12, a second substrate 52 formed spacially from the first substrate, a second operation electrode 54 formed in a position on the second substrate spaced from the first operation electrode, and a micromachine 14 arranged between the first operation electrode 20 and the second operation electrode 54. It is featured by that the first electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the first operation electrode for moving the micromachine to a first position in a direction of the first substrate, and the second operation electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the second operation electrode for moving the micromachine to a second position in a direction of the second substrate.
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