| 摘要 |
PURPOSE: A wafer chuck for spinning wafer is provided to resolve the problems occurring when holding the wafer physically using a cylinder and a motor and holding the wafer using a vacuum absorption. CONSTITUTION: A wafer chuck holds the wafer with the centrifugal force being generated while the wafer spins. When the driving force like a motor operates, the force is delivered to the shaft(180) transforming into a torque, in turn, turing(A) the wafer supporter(250). Then the locker(50) of the holder(100) goes into a hinge movement(B) within the case(70). The lower part(48) of the locker(50) moves toward the outside, through the second opening(64), and the projection(44) of the upper part(46) of the locker(50) moves(D) toward the wafer and holds the wafer.
|
