ROLLING BAR OF VERTICAL ETCHING SYSTEM

摘要

PURPOSE: A rolling bar of a vertical etching bar is provided to improve the flatness of a wafer by forming a multitude of projection on an outer circumference of a rolling bar. CONSTITUTION: A rolling bar(30) supports and rotates a wafer to perform a uniform etching process. The rolling bar(30) is installed at an inside of a process box. An elastic member(32) is adhered to the rolling bar(30). The elastic member(32) prevents a flow of the fresh chemical to an edge of a wafer through an outer circumference of a cylindrical body(31). The elastic member(32) is installed to rotate smoothly the wafer. The elastic member(32) is formed with a multitude of projection. The projection has a fan shape.