发明名称 METHOD FOR FORMING SEMICONDUCTOR LAYER
摘要 PROBLEM TO BE SOLVED: To provide a forming method for a semiconductor which can shorten an operation time and lower manufacture cost by greatly decreasing the defect density of structure defects in the semiconductor layer, especially the density of penetration dislocation, without requiring complicated processes. SOLUTION: With this method for forming a semiconductor layer, a structural defect suppressing substance which suppresses structure defects in the semiconductor layer is supplied to then top surface of a substance layer, where the semiconductor layer is formed.
申请公布号 JP2001176804(A) 申请公布日期 2001.06.29
申请号 JP19990354563 申请日期 1999.12.14
申请人 INST OF PHYSICAL & CHEMICAL RES;TANAKA SATORU;TAKEUCHI MICHIICHI 发明人 TANAKA SATORU;TAKEUCHI MICHIICHI;AOYANAGI KATSUNOBU
分类号 C30B25/02;H01L21/20;H01L21/203;H01L21/205;H01L33/12;H01L33/16;H01L33/32;H01L33/34;H01S5/323;H01S5/343 主分类号 C30B25/02
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