发明名称 |
METHOD FOR FORMING SEMICONDUCTOR LAYER |
摘要 |
PROBLEM TO BE SOLVED: To provide a forming method for a semiconductor which can shorten an operation time and lower manufacture cost by greatly decreasing the defect density of structure defects in the semiconductor layer, especially the density of penetration dislocation, without requiring complicated processes. SOLUTION: With this method for forming a semiconductor layer, a structural defect suppressing substance which suppresses structure defects in the semiconductor layer is supplied to then top surface of a substance layer, where the semiconductor layer is formed. |
申请公布号 |
JP2001176804(A) |
申请公布日期 |
2001.06.29 |
申请号 |
JP19990354563 |
申请日期 |
1999.12.14 |
申请人 |
INST OF PHYSICAL & CHEMICAL RES;TANAKA SATORU;TAKEUCHI MICHIICHI |
发明人 |
TANAKA SATORU;TAKEUCHI MICHIICHI;AOYANAGI KATSUNOBU |
分类号 |
C30B25/02;H01L21/20;H01L21/203;H01L21/205;H01L33/12;H01L33/16;H01L33/32;H01L33/34;H01S5/323;H01S5/343 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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