| 摘要 |
PROBLEM TO BE SOLVED: To provide a process chamber which can have its upper lid member manufactured with a light-weight constitution and suppress the tilt and strain of a window provided thereto. SOLUTION: This process chamber 20 has in its upper lid member 22 the window 22 capable of transmitting laser light, and the upper lid member is minimized in thickness and provided with a rib member 30 for reinforcement, so as to suppress the tilt and strain of the window.
|
