| 摘要 |
PROBLEM TO BE SOLVED: To provide a method which generates an ideal output so that an electromechanical grating device can be operated with a higher frequency by opening a ribbon element of the device so that the quantity of diffracted light may be free from undesired temporary variance caused by resonance of the ribbon element. SOLUTION: This method determines a bottom surface and damps electromechanical ribbon elements on a channel having a bottom conductive layer formed under this bottom surface and is provided with a stage, where at least one fixed-amplitude voltage pulse is given to at least one ribbon element, and a stage where damping pulses obtained by dividing the fixed- amplitude voltage pulse by a narrow temporary gap are given to at least one ribbon element. This method can damp ribbon elements, which are operated not so as to come into contact with the bottom of the channel, in a high grade.
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