| 摘要 |
PROBLEM TO BE SOLVED: To provide a ultrasonic vibrator which has stable vibration property even in high loading and realizes good flip-chip bonding. SOLUTION: A vertical vibration transmission part 3 is provided with a combination part 8 of an inertia measure 4 and a deflection vibration part 5, and a body device, and the combination part 8 is provided with a vibration damper 9 for restraining transverse vibration leak. The vibration relief 9 has enough twist rigidity in a pressurizing direction and can relief transverse vibration. At least two deflection vibration parts 5 are provided and shearing force and moment in loading are balanced. Thereby, a ultrasonic vibrator 1 with stable vibration characteristic even in high loading can be realized.
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