| 摘要 |
PROBLEM TO BE SOLVED: To obtain a small-sized semiconductor phase shifter, whose setting phase according has less frequency dependence. SOLUTION: A slot line pattern and a twisted slot line pattern are placed between a 1st input output coplanar line pattern and a 2nd input output coplanar line pattern on a semiconductor substrate, and 1st-4th FETs switch the propagation path of a microwave signal, that is received from the 1st input output coplanar line pattern and outputted to the 2nd input output coplanar line pattern, from the slot line pattern side into the twisted slot line pattern side. |
