发明名称 INTEGRATED CIRCUIT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To detect an error which is caused by taking an incorrect mask at manufacture of an integrated circuit which has a specified function desired by user. SOLUTION: This integrated circuit has the second structure S2 which is used for materializing a predetermined function generated using an exposure mask MSKi on a plurality of fixed wiring levels M1, M2, P, and is used for inspecting the attribution of a used mask to a common mask set MSKS, on the plurality of fixed wiring levels, in addition to the first structure S1.
申请公布号 JP2001177067(A) 申请公布日期 2001.06.29
申请号 JP20000370494 申请日期 2000.12.05
申请人 INFINEON TECHNOLOGIES AG 发明人 MANYOKI ZOLTAN
分类号 G03F1/00;H01L21/027;H01L21/822;H01L23/544;H01L27/04 主分类号 G03F1/00
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