| 摘要 |
PROBLEM TO BE SOLVED: To improve the control performance of stages. SOLUTION: A 1st stage control system L1 controls a 1st linear motor 16 on the basis of the positional information of a 1st stage PST while considering the thrust ripple of the motor 16. A 2nd stage control system L2 controls a 2nd linear motor 14 on the basis of the positional information of the 1st stage PST and that a 2nd stage MST while considering the thrust ripple of the motor 14 and the 2nd stage MST is controlled so that prescribed positional relation is formed between the 1st stage PST and the 2nd stage MST. Since the influence of thrust ripple including in linear motor driving thrust for driving both the stages PST, MST can be offset, the position/speed control performance of the 1st stage PST can be improved and the follow-up performance of the 2nd stage MST to the 1st stage PST can be also improved.
|
