ION BEAM EQUIPMENT AND AUGER MICROPROBE

摘要

PROBLEM TO BE SOLVED: To provide an ion beam equipment that can obtain SIM image of a sample, even when an ion gun of a gas-ionization type is used. SOLUTION: When acquiring an SIM image, the ion beam from an ion beam radiating means 13 is focussed on a point Q and fixed there. Moreover, a stage scanning circuit 34 sends stage scanning signal to scan the ion beam two- dimensionally in a prescribed range on the sample to a stage control means 35, which controls an XY stage driving means 36, based on the stage scanning signal. Then secondary electrons produced from the specimen caused by the ion beam radiation are detected with a secondary electron detector 32, and detected signals are stored at positions on the graphic memory of a display means 41 corresponding to stage positions. The display means 41 successively reads out signals stored on the graphic memory and makes the SIM image of the sample displayed at prescribed positions on a display 42.