摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of accurately comparing the sensitivities of the electronic spectroscopes of respective apparatuses. SOLUTION: A current proportional to the intensity of incident X-rays flows across the P-N junctions of a detection element 18 to be detected by the current detection part 22 connected to a current input terminal 21 and the signal I showing this current is sent to a control device 23. The control device 23 takes the comparison of the current signal I and the signal S showing the area of an X-ray through-hole 16 to calculate current quantity per a unit area. The current quantity corresponds to the X-ray intensity x0 per unit area of X-rays from an X-ray monochrometer spectral crystal 6 and the control device 23 converts the calculated current quantity to the X-ray intensity x0. Thereafter, the standard sample of the sample holder attached to a sample receiving stand 11 is irradiated with X-rays and the control device 23 calculates the sensitivity of an electronic spectroscope on the basis of the intensity of the output signal of a detector 27 and the X-ray intensity x0.</p> |