| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film growth flow generation system, which improves the efficiency of the generation of a growth program needed to form a semiconductor device, by generating and supplying the growth program to a thin-film manufacturing device and preventing wrong put. SOLUTION: A computer 1 comprises 1 comprises a CPU, a memory, a storage part, etc., and a program which makes the computer 1 operate is stored in the storage part. The computer 1 generates a growth program with data inputted by an operator on a keyboard 4 or with a mouse. On a generation picture for the growth program displayed on a CRT 2, the step of a process for inputting the data and growth conditions of this step and a step before comparison are displayed as two pictures. The growth program generated by the computer 1 is transferred as a text file to an MOCVD device 6, to control the thin-film growth by the MPCVD device 6.
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