APPARATUS AND METHOD FOR OPTICALLY INSPECTING THROUGH- HOLE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of optically inspecting a through-hole at a high speed with high productivity. SOLUTION: The optical inspection apparatus for inspecting through-holes A1-D3 piercing a substrate 4 and having plating applied to the inner surfaces thereof is equipped with an illumination means 51 for irradiating one surface of the substrate 4 with light to illuminate the vicinities of the through-holes A1-D3 so that light is not incident on the insides of the through-holes A1-D3 and a sensor 53 receiving the lights from the through-holes A1-D3 of the substrate 4 illuminated by the illumination means 51 on the other side of the substrate 4. Since the illumination means for illuminating the substrate so that light is not incident on the insides of the through-holes is provided, even if a lid is not physically applied to the through-holes, the through-holes can be illuminated so that light is not incident on the insides of the through-holes.