| 摘要 |
PROBLEM TO BE SOLVED: To improve tower transmission efficiency, hold the gas-tightness of a discharge tube to prevent contamination of the laser gas. SOLUTION: The laser gas circulating mechanism is composed of a cross-flow fan 14 for circulating the laser gas in the discharge tube 4, and a motor 15 for rotating the cross-flow fan 14 at a position of the motor outside the discharge tube 4. The cross-flow fan 14 and the motor 15 have a common rotary shaft 16 which is contactlessly supported with magnetic bearings 19, 26 disposed outside the discharge tube 4 and passes through magnetic seals 20, 27 disposed inside the discharge tube 4. |
