| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamber type ion-carrying ionizing device and method capable of eliminating ozone or electromagnetic noises as well as dust or the like and also of electricity in a narrow space. SOLUTION: Ionization sources 4 such as soft X-ray, low energy electron beam, a generation part of ultra-violet ray or surface creepage or sealed radioisotope are arranged inside a chamber 1. A control device 5 consisting of a power source part and a control part of the ionization sources 4 are arranged outside the chamber 1. At downstream of the chamber 1, there is provided a shield part made of a plurality of partition walls 7, 7 which shield soft X-ray, low-energy electron beam, or radiation or the like from radioisotope.
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