| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor pressure switch, in which the airtightness of a closed space arranged inside can be maintained for a long time and a chattering hardly occurs in shutting the pressure switch, and which has a fast response speed and low actuating pressure. SOLUTION: On an upper substrate which has an diaphragm, a first electro- conductive layer, a second electro-conductive layer separated from the former and surrounding the former, and a pair of first contact areas formed on the first and second electro-conductive layers are arranged. On a lower substrate opposed to the upper substrate, a concave and a second contact area in the concave are installed, and the first contact area is formed in the concave. When an outside force is applied to the diaphragm, the pressure switch is connected.
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