| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device preventing a window part of an electron beam tube from being polluted by an impurity gas, to hold the output of the electron beam constant, to prevent the window part from being broken, and to easily shift the electron beam relative to a material to be processed at a desired speed. SOLUTION: The electron beam irradiation device processing the material 5 to be processed by irradiating the electron beam thereto is characterized by a means shifting an electron beam irradiation device body 1 having the electron beam tube 2, relative to the material 5 to be processed in processing the material 5 to be processed by irradiating the electron beam thereto.
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