| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor test system capable of rapidly and efficiently testing even a mixed signal integrated circuit having analog signals and digital signals mixed therein by modularizing various types of different test devices and combining a plurality of these devices with each other. SOLUTION: This semiconductor test system comprises a tester module having two or more different types of performances, a test head having these two or more types of test modules having different types of performances combined by two or more pieces with each other and mounted thereto, a means for electrically connecting the test module to a tested device, an additional circuit provided between the test module and tested device in correspondence with the analog function block of the tested device, and a host computer controlling the operation of the entire system by communicating with the test module mounted on the test head through a system bus.
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