| 摘要 |
PROBLEM TO BE SOLVED: To provide a microgyroscope which is equipped with two resonance plates. SOLUTION: A substrate is provided. A first frame and a second frame which are faced with each other in a prescribed height on the substrate are provided. A plurality of anchor parts which support the first frame and the second frame with reference to the substrate are provided. A first resonance plate which is situated between the first frame and the second frame and which separates the first frame and the second frame from each other by a prescribed distance is provided. A second resonance plate is provided. A matching link means which is coupled to the first resonance plate and the second resonance plate, which is operated by the movement of the resonance plate on one side to a first direction inside the extension face of both resonance plates and which operates the resonance plate on the other side to a second direction opposite to the first direction is provided. Therefore, the difference in a resonance frequency between the resonace plates is resonated due to a self- resonance matching structure by a matching link part. It is possible to ontain the microgyroscope in which the tolerance range of a process error is large, which is manufactured easily, in which the reliability and the linearity of a resonance structure are high, which prevents a mode coupling operation by separating a driving beam from a sensing beam and whose sensitivity is increased. |
