| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact inspecting apparatus for stabilizing inspection, suppressing the increase in inspecting time by limiting the time for correction to the minimum and minimizing the influence of the change of a lift-off without adding a distance sensor or the like by correcting the change of the lift-off such as setting error of an inspecting probe and an object to be inspected, the tolerance or the like of the object. SOLUTION: The non-contact inspecting apparatus detects the defect of an object to be inspected in a non-contact manner based on the magnetic flux change of an eddy current by the probe having a coil. The apparatus comprises a driver for regulating the position of the probe, and a measuring means for measuring the lift-off between the probe and the object based on the detection signal of the probe, and controls the lift-off by driving the driver according to the measured result of the means.
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