| 摘要 |
PROBLEM TO BE SOLVED: To release a bonding action between a substrate and a support part, and smoothly lift up the substrate from the support part. SOLUTION: A substrate supporter 21 comprises a support part 21a for supporting a substrate P and a lifting mechanism 3 for bringing up and down the substrate P with respect to a support part 21a, and also comprises a second lifting mechanism 22 for printing up and down independently the lifting mechanism 3 with respect to the support 21a. |
