| 摘要 |
PROBLEM TO BE SOLVED: To obtain a manufacturing method, in which a very small high- performance piezoelectric actuator of stable quality can be manufactured with high efficiency. SOLUTION: This piezoelectric actuator is manufactured of a composite material 20, in which a piezoelectric element material 11a and a support material 12a are laminated. Electrodes 13, 14 are installed at the piezoelectric element material 11a. Masks 21, 22 in prescribed patterns are formed on the piezoelectric element material 11a and the support material 12a. The support material 12a is composed of a brittle and elastic material which is composed of a ceramic, a glass, Si or the like. In a blasting process, solid fine particles 30, whose hardness is equal to or more than that of the support material 12a, are blasted into the composite material 20, and parts other than the masks 21, 12 are crushed so as to be removed. Thereby, the piezoelectric actuator 10 can be obtained, which has the piezoelectric elements 11 and supports in desired patterns according to the masks 21, 22. |
