发明名称 MASS SPECTROMETRY AND MASS SPECTROGRAPH FOR HALOGENATED COMPOUND
摘要 PROBLEM TO BE SOLVED: To provide a mass spectrometry and mass spectrograph for a halogenated compound capable of accurately measuring a fluorinated compound or the like affecting a large influence to a global warming issue by applying a Fujii's positive ion adhering method to the mass spectrometry of a halogenated compound. SOLUTION: The mass spectrograph for halogenated compound comprises an emitter 12 for radiating metal ion, a reaction chamber 20 for introducing a gas to be detected and ionizing the gas by the metal ion, apertures 26, 27, etc., for guiding the molecules of the ionized gas to be detected, and a mass spectrometer 34 for measuring the introduced molecules. In this case, the metal ion radiated from the emitter is made to fly to the chamber and ionized therein. The gas to be detected is the halogenated compound. The mass spectrograph further comprises a sample gas supply source 21 for supplying the halogenated compound to the chamber, and an N2 gas supply source 22 for supplying a gas (N2 or the like) hardly adhering metal ion as compared with the halogenated compound to the chamber.
申请公布号 JP2001174437(A) 申请公布日期 2001.06.29
申请号 JP19990356725 申请日期 1999.12.15
申请人 ANELVA CORP 发明人 SHIOKAWA YOSHIRO;FUJII TOSHIHIRO
分类号 H01J49/10;G01N27/62;H01J49/42;(IPC1-7):G01N27/62 主分类号 H01J49/10
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