发明名称 |
METHOD FOR PRODUCING HIGH PLANARITY SEMICONDUCTOR WAFER, AND HIGH PLANARITY SEMICONDUCTOR WAFER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a high planarity semiconductor wafer and a high planarity semiconductor wafer, in which high planarity is attained for every site through plasma etching. SOLUTION: The method for producing a high planarity semiconductor wafer by machining the surface of a semiconductor wafer through plasma etching comprises a step for measuring irregularities on the surface to be machined, and a step for locally plasma etching the surface to be machined, while varying the etching amount depending on the irregularities measured in a step for machining the surface to be machined thus planarizing the surface to be machined, wherein the plasma machining step separates the period of the irregularities D0 into a high-frequency component DH and a low-frequency component DL, based on a preset boundary frequency and uses only the irregularities of high frequency component for machining.
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申请公布号 |
JP2001176845(A) |
申请公布日期 |
2001.06.29 |
申请号 |
JP19990363431 |
申请日期 |
1999.12.21 |
申请人 |
MITSUBISHI MATERIALS SILICON CORP |
发明人 |
TANIGUCHI TORU;MORITA ETSURO |
分类号 |
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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