SEMICONDUCTOR WAFER THERMAL PROCESSOR

摘要

PROBLEM TO BE SOLVED: To perform a thermal process by a thermal processor which thermally processes a semiconductor wafer without shortening the lifetime of a small number of carriers. SOLUTION: A reaction gas introducing pipe 7 is provided which introduces reaction gas into reaction pipe 11. Semiconductor wafers 12 supported by a wafer support 8 are inserted into the reaction pipe 11. A cooling gas introducing pipe 6 which blows cooling gas directly to the respective semiconductor wafer 12, and a cooling gas discharge pipe 3 for discharging the cooling introduced into the reaction pipe 11, are provided.