发明名称 Method for processing small workpieces comprises placing the workpieces on the base of a processing chamber and subjecting the workpieces to a treatment fluid using a stirrer
摘要 Method for processing small workpieces comprises placing the workpieces on the base (9) of a processing chamber (6) and subjecting the workpieces to a treatment fluid using a stirrer (12). An independent claim is also included for a device for carrying out the process. Preferred Features: The treatment fluid is an electrolyte, a cleaning agent or a pickling agent. Paddles (13, 14) of the stirrer are used as electrodes.
申请公布号 DE10004740(C1) 申请公布日期 2001.06.28
申请号 DE20001004740 申请日期 2000.01.28
申请人 SIEMENS AG 发明人 HULYK, MICHAEL;MICHELSEN-MOHAMMADEIN, URSULA
分类号 C23G3/00;C25F7/00;(IPC1-7):C25F3/00;C25F1/00;C25D3/00;C23G1/00;C23F1/00 主分类号 C23G3/00
代理机构 代理人
主权项
地址