HIGH SPEED MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
摘要
Voltage timing compensation is achieved by incorporating in a circuit (120) a function generator to provide a more accurate non-linear compensation to pulse timing delay, which is typically a non-linear function of voltage. Temperature measurements are made and used to drive the timing compensation circuitry (220) for an accurate temperature timing compensation while still using a relatively simple compensating circuit. In some embodiments a timing compensation circuit (320) combines both voltage and temperature timing compensation.
申请公布号
WO0147073(A1)
申请公布日期
2001.06.28
申请号
WO2000US33200
申请日期
2000.12.06
申请人
CYMER, INC.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;JOHNS, DAVID, M.
发明人
NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;JOHNS, DAVID, M.