发明名称 HIGH SPEED MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT
摘要 Voltage timing compensation is achieved by incorporating in a circuit (120) a function generator to provide a more accurate non-linear compensation to pulse timing delay, which is typically a non-linear function of voltage. Temperature measurements are made and used to drive the timing compensation circuitry (220) for an accurate temperature timing compensation while still using a relatively simple compensating circuit. In some embodiments a timing compensation circuit (320) combines both voltage and temperature timing compensation.
申请公布号 WO0147073(A1) 申请公布日期 2001.06.28
申请号 WO2000US33200 申请日期 2000.12.06
申请人 CYMER, INC.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;JOHNS, DAVID, M. 发明人 NESS, RICHARD, M.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;JOHNS, DAVID, M.
分类号 H01S3/097;H01S3/038;H01S3/225;H02M3/00;H02M3/155;H02M3/157;H03K3/45;H03K3/57;H03K5/13;(IPC1-7):H01S3/00;H01S3/04;H01S3/10 主分类号 H01S3/097
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