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发明名称
Sensor für gleichzeitige Rasterkraftmikroskopie und optische Nahfeldmikroskopie
摘要
申请公布号
DE19713746(C2)
申请公布日期
2001.06.28
申请号
DE1997113746
申请日期
1997.04.03
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH;OMICRON VAKUUMPHYSIK GMBH
发明人
RUF, ALEXANDER;BERGHAUS, THOMAS;ABRAHAM, MICHAEL;GUETHNER, PETER
分类号
B06B1/06;G01H1/12;G01N29/06;G01Q60/06;(IPC1-7):G12B21/02;H01J37/28;G01H17/00
主分类号
B06B1/06
代理机构
代理人
主权项
地址
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