发明名称 |
METHOD AND APPARATUS FOR SUPERCRITICAL PROCESSING OF A WORKPIECE |
摘要 |
An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module, and the non-supercritical processing module are coupled to the transfer module. The robot is preferably located within the transfer module. In operation, the robot transfers a workpiece from the entrance of the transfer module to the supercritical processing module. After supercritical processing, the robot then transfers workpiece from the supercritical processing module to the non-supercritical processing module. After the non-supercritical processing, the robot returns the workpiece to the entrance of the transfer module. Alternatively, the non-supercritical processing is performed before the supercritical processing.
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申请公布号 |
WO0146999(A2) |
申请公布日期 |
2001.06.28 |
申请号 |
WO2000US41853 |
申请日期 |
2000.11.01 |
申请人 |
SUPERCRITICAL SYSTEMS, INC. |
发明人 |
BIBERGER, MAXIMILIAN, A.;LAYMAN, FREDERICK, PAUL;SUTTON, THOMAS, ROBERT |
分类号 |
C23C14/50;B65G49/07;C23C16/44;G03F7/42;H01L21/00;H01L21/027;H01L21/304;H01L21/3065;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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