发明名称 Method to operate film leak tester; involves using form test chamber, which is evacuated using one pump, before testing using second vacuum pump and taking ambient helium concentration into account
摘要 The method involves using a tester with a film (5,6) extended in each of two frames (3,4) to form a test chamber for an item to be tested, and two vacuum pumps (13,30) to evacuate the test chamber before testing for leaks. During a first evacuation phase, only one vacuum pump is used and during leak testing only the second vacuum pump is used. The ambient helium concentration is measured before testing and used to correct the leak measurement. An Independent claim is included for a film leak tester for implementing the method.
申请公布号 DE19962006(A1) 申请公布日期 2001.06.28
申请号 DE19991062006 申请日期 1999.12.22
申请人 LEYBOLD VAKUUM GMBH 发明人 WIDT, RUDI
分类号 G01M3/20;G01M3/22;(IPC1-7):G01M3/32 主分类号 G01M3/20
代理机构 代理人
主权项
地址