Mikroventilanordnung

摘要

A micro-valve arrangement whose micro-valve has a housing containing two opposite housing layers, between which a valve chamber is delimited, wherein a valve member is located. A fluid duct extending in one housing layer opens into the valve chamber and is controlled by the valve member. By means of an electrically operated actuator it is possible for the position of the valve member to be predetermined. Furthermore a position detector is present, which on the basis of the measured capacitance of a capacitor renders it possible to find the position of the valve member. This capacitor comprises two capacitor faces which are provided opposite to each other in the direction of motion of the valve member and on one of the housing layers.