发明名称 Semiconductor device
摘要 A semiconductor device includes a plurality of shallow trench isolation bands, a plurality of channels, a source electrode, a drain electrode, and a gate electrode. The shallow trench isolation bands are formed in a band-like shape within an element formation region defined by a shallow trench isolation region. The plurality of channels are isolated from each other by the shallow trench isolation bands and extend parallel to each other. The source electrode is formed at one end of each channel. The drain electrode is formed at the other end of each channel. The gate electrode is formed on the channels across the shallow trench isolation bands. A method of manufacturing this device is also disclosed.
申请公布号 US2001005022(A1) 申请公布日期 2001.06.28
申请号 US20000740980 申请日期 2000.12.21
申请人 NEC CORPORATION. 发明人 OGURA TAKASHI
分类号 H01L21/76;H01L21/335;H01L21/762;H01L21/8234;H01L27/08;H01L29/10;H01L29/78;(IPC1-7):H01L33/00 主分类号 H01L21/76
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