发明名称 Thin film transistor and method of fabricating the same
摘要 A thin film transistor which can be used in an LCD display panel includes an insulator substrate, a gate electrode located on the insulator substrate, an insulator film provided on the insulator substrate and the gate electrode, and a polycrystalline silicon film located on the insulator film. A channel is defined in a first portion of the polycrystalline silicon film over the gate electrode, and a drain and a source are defined in second and third portions of the polycrystalline silicon film over the insulator substrate. Grain sizes of the drain and source are equal to or greater than a grain size of the channel.
申请公布号 US2001005020(A1) 申请公布日期 2001.06.28
申请号 US20010753397 申请日期 2001.01.03
申请人 SANYO ELECTRIC CO., LTD. 发明人 JINNO YUSHI;WAKITA KEN;MINEGISHI MASAHIRO
分类号 G02F1/1333;G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;G09F9/30;G09G3/36;H01L21/02;H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/04;H01L29/786;(IPC1-7):H01L31/20 主分类号 G02F1/1333
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