Angular velocity sensor

摘要

An angular velocity sensor includes a substrate; a first vibrator supported on said substrate by a first support beam, such as to be vibratable in a direction parallel to said substrate; a second vibrator supported by a second support beam parallel to said first vibrator, such as to be vibratable in a direction orthogonal to the vibrating direction of the first vibrator; vibration generating means for vibrating the first vibrator parallel to said substrate; angular velocity detecting means for detecting the amount of displacement of the second vibrator due to an angular velocity; and vibration-state monitor means provided between the substrate and the first vibrator for monitoring the amount of displacement of the first vibrator when it is vibrated by the vibration generating means.