DOPING-INDEPENDENT SELF-CLEANING ETCH PROCESS FOR POLYSILICON,申请号EP19990932144-传众专利搜索

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发明名称	DOPING-INDEPENDENT SELF-CLEANING ETCH PROCESS FOR POLYSILICON
摘要
申请公布号	EP1109955(A1)	申请公布日期	2001.06.27
申请号	EP19990932144	申请日期	1999.06.30
申请人	APPLIED MATERIALS, INC.	发明人	NALLAN, PADMAPANI;CHINN, JEFFREY;YUEN, STEPHEN
分类号	H01L21/302;H01L21/02;H01L21/3065;H01L21/3213;(IPC1-7):C30B33/12;H01L21/306	主分类号	H01L21/302
代理机构		代理人
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