发明名称 |
A wire sawing machine with saw wire tension control |
摘要 |
An ingot 9 is sliced to wafers by a wire 5 which travels around grooved rollers 1 to 3. A tension applied to the wire 5 is detected by tension sensors 21, while vertical displacement of dancer rollers 19 is detected by position sensors 20. At least one of a fluctuation gap of the tension, a fluctuating velocity of the tension, an acceleration of the fluctuation, vertical movement of the dancer rollers 19, a velocity of the vertical movement and acceleration of the vertical movement is calculated from the detection results, and compared with a threshold in a calculating circuit 23 to judge a sign predicting abnormal increase of the tension. When the predicting signal appears, a command signal is outputted from the calculating circuit 22 to a controller 23 to stop operation of a wire-sawing machine or to relax the wire 5. Since rupture of the wire 5 is prevented in bud, a wire-sawing machine is efficiently driven for slicing the ingot 9 with a high productivity. <IMAGE> |
申请公布号 |
EP1110652(A1) |
申请公布日期 |
2001.06.27 |
申请号 |
EP19990125516 |
申请日期 |
1999.12.22 |
申请人 |
SUPER SILICON CRYSTAL RESEARCH INSTITUTE CORP.;TOKYO SEIMITSU CO.,LTD. |
发明人 |
OISHI, HIROSHI;ASAKAWA, KEIICHIRO;MATSUZAKI, JUNICHI |
分类号 |
B24B27/06;B23D57/00;B28D5/04;H01L21/304 |
主分类号 |
B24B27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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