发明名称 Method of designing dummy wiring
摘要 Wiring of a non-uniform density is laid out on a chip. Then, the chip is virtually divided into a plurality of sub chips. The wiring density of each sub chip is obtained to obtain the density distribution function of wiring. After that, an index indicative of variations in the density of wiring is obtained on the basis of the density distribution function, thereby determining whether or not the index falls within an allowable range. If the index is out of the allowable range, the density distribution function is repeatedly updated until the index falls within the allowable range. Dummy wiring is provided on a region obtained by subtracting a region corresponding to the initial density distribution function from a region corresponding to the last density distribution function.
申请公布号 US6253362(B1) 申请公布日期 2001.06.26
申请号 US19980175582 申请日期 1998.10.20
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ANAND MINAKSHISUNDARAN BALASUBRAMANIAN;OHTANI HIROSHI
分类号 H01L21/82;G06F17/50;H01L23/522;(IPC1-7):G06F17/50 主分类号 H01L21/82
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