| 摘要 |
A method for increasing electrical resistivity of at least a portion of a substrate includes providing a ceramic substrate and carrying out at least one of ion implantation and plasma immersion on the ceramic substrate with ions derived from at least one source selected from the group consisting of noble gases, nitrogen, oxygen, halogens, halogen compounds, silicon, and antimony. The method provides a modified region within the substrate extending from a surface of the substrate into the substrate and having enhanced electrical resistivity. The method can be applied in the production of thin film magnetic recording heads and devices incorporating such heads. The method obviates shortcomings associated with conventional magnetic recording head fabrication techniques.
|
