ORGANIC FILM, METHOD OF MANUFACTURING THE SAME AND FILM FORMING APPARATUS USED THEREIN

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing an organic film capable of being formed even on an uneven base material with high work efficiency and coating efficiency and the organic membrane free from pinhole and uniform in thickness. SOLUTION: A solution for forming an organic film containing a silane compound having a chlorosilyl group is ejected toward a base material as mist- like liquid drops in an airless state and the silane compound is adsorbed and fixed onto the surface of the base material to form the organic film. By this constitution, production cost is reduced while not only production efficiency but also workability can be enhanced.