发明名称 Process for manufacturing microstructured bodies
摘要 A method for manufacturing a microstructured body, comprises irradiating a material with a pattern of X-rays; and dissolving selectively irradiated or non-irradiated regions of the material, where the material comprises a light-hardening and/or UV-hardening epoxy coating. The epoxy coatings need shorter irrdiation times than known plastics. The resulting microstructures can have high aspect ratios, and the developed structures can be produced with greater structure depths, free of defects and faults. Structural precision is in the submicron range.
申请公布号 US6251567(B1) 申请公布日期 2001.06.26
申请号 US19980157518 申请日期 1998.09.21
申请人 MICROPARTS GESELLSCHAFT 发明人 REINECKE HOLGER;KAPITZA NORBERT;BALLHORN RALPH-ULRICH;SPITZNER ULRIKE;SCHAEFERMEIER BERNHARD
分类号 G03F7/027;B62D57/00;B81C3/00;G03F7/00;G03F7/038;G03F7/20;G03F7/32;H01L21/027;(IPC1-7):G03F7/20 主分类号 G03F7/027
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